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Electron microprobe
The electron microprobe is an analytical tool used to non-destructively determine the chemical composition of small volumes of solid materials. It uses a high-energy focused beam of electrons to generate X-rays characteristic of the elements present within a sample volumes 1 to 3 micrometres across and can quantitatively analyze elements from boron to plutonium at routine levels as low as 100 parts per million (ppm).
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